郭登极，男，深圳大学微电子研究院副院长，工学博士、副教授。1984年生，曾在日本学习和工作11年，2013年于东京大学机械工程系取得博士学位，曾分别在日本三菱电机公司和原德州仪器公司从事工业自动化产品和压力传感器的研发。现担任中国机械工程学会微纳制造技术分会委员、中国微米纳米技术学会微纳执行器与微系统分会理事、国家基金委、深圳市发改委/经信委/科创委项目评审专家等。主要研究领域为：微电子制造工艺及设备。首次提出并验证了达纳米级精度的微纳加工实时检测及补偿控制方法。近5年主持国家基金委、广东省自然科学基金及深圳市重点项目等纵向项目，主持的经费总额近1000万元；发表SCI论文超30篇、授权国内外专利超30项；获日本应用物理学会优秀论文奖、中国特种加工学会优秀论文奖、广东省教学成果二等奖、深圳大学教学成果奖等奖项。

Topic title: 3D micro/nanoscale additive manufacturing using focused ion beam chemical vapor deposition

Abstract:

In the realm of micro and nano-scale additive manufacturing, Focused Ion Beam Chemical Vapor Deposition (FIB-CVD) has been identified as a transformative technology for the fabrication of three-dimensional structures with nanometer order precision. This paper explores advancements in 3D micro/nanoscale additive manufacturing facilitated by FIB-CVD, emphasizing its pivotal role in producing devices with features across the micro to nanoscale. We offer an extensive analysis of FIB-CVD, including physical property characterization of micro/nanostructures, development of techniques for crafting large-area, high-precision structures, and strategies for assembling 3D layered constructs. Our findings reveal significant enhancements in the accuracy and quality of 3D micro/nanostructures, underscoring FIB-CVD's capacity to fulfill the exacting demands of micro-electromechanical systems (MEMS), semiconductor, and integrated circuit sectors, among others. This research underpins the evolution of high-precision, superior-quality 3D printing technologies, propelling forward sectors such as electronic information communication, digital high-definition display, and advanced manufacturing.